Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591095 | Reclaim function for semiconductor processing system | Norbert Fanjat, Karl J. Urquart, Laurent Langellier | 2013-11-26 |
| 8235580 | Reclaim function for semiconductor processing systems | Norbert Fanjat, Karl J. Urquart, Laurent Langellier | 2012-08-07 |
| 8191397 | Methods for checking and calibrating concentration sensors in a semiconductor processing chamber | Francois Doniat, Ronald S. Inman, Nathan Stafford, Jean-Louis Marc | 2012-06-05 |