Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8591095 | Reclaim function for semiconductor processing system | Norbert Fanjat, Axel Soulet, Laurent Langellier | 2013-11-26 |
| 8235580 | Reclaim function for semiconductor processing systems | Norbert Fanjat, Axel Soulet, Laurent Langellier | 2012-08-07 |