Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9966268 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsuro SEINO | 2018-05-08 |
| 9824883 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2017-11-21 |
| 9745656 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2017-08-29 |
| 9666439 | Method of manufacturing a semiconductor device and recording medium | — | 2017-05-30 |
| 9653351 | Method of manufacturing semiconductor device | Atsuro SEINO | 2017-05-16 |
| 9653301 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2017-05-16 |
| 9508555 | Method of manufacturing semiconductor device | Yukinao KAGA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2016-11-29 |
| 9472637 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2016-10-18 |
| 9437704 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Sadayoshi Horii, Hideharu Itatani | 2016-09-06 |
| 9425039 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuhiro Harada | 2016-08-23 |
| 9406520 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-08-02 |
| 9378964 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-06-28 |
| 9368358 | Method of manufacturing a semiconductor device | Kazuhiro Harada, Motomu DEGAI, Masahito Kitamura, Hiroshi Ashihara | 2016-06-14 |
| 9355850 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2016-05-31 |
| 9190281 | Method of manufacturing semiconductor device | Kazuhiro Harada, Hiroshi Ashihara | 2015-11-17 |
| 9123644 | Semiconductor device, method of manufacturing semiconductor device and system of processing substrate | — | 2015-09-01 |
| 9082747 | Method, apparatus, and non-transitory computer readable recording medium for manufacturing a semiconductor device with an amorphous oxide film | — | 2015-07-14 |
| 9059089 | Method of manufacturing semiconductor device | Kazuhiro Harada, Hiroshi Ashihara | 2015-06-16 |
| 9012323 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2015-04-21 |
| 8994124 | Semiconductor device, method of manufacturing semiconductor device and system of processing substrate | — | 2015-03-31 |
| 8951912 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and computer-readable recording medium | Tsuyoshi Takeda | 2015-02-10 |
| 8937022 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | — | 2015-01-20 |
| 8741731 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Sadayoshi Horii, Hideharu Itatani | 2014-06-03 |
| 8420552 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Sadayoshi Horii, Hideharu Itatani | 2013-04-16 |
| 8404603 | Method of manufacturing semiconductor device and substrate processing system | Sadayoshi Horii, Taketoshi Sato, Hideharu Itatani, Nobuyuki Mise, Osamu Tonomura | 2013-03-26 |