Shutter disk

Assignee

• Applied Materials

Inventors

• Zhang Kang (1 patents)
• Junqi Wei (16 patents)
• Yueh Sheng Ow (30 patents)
• Kelvin Boh (12 patents)
• Yuichi Wada (60 patents)
• Ananthkrishna Jupudi (44 patents)
• Sarath Babu (16 patents)

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