Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for reducing defects in preclean chambers

Methods and apparatus for reducing defects in preclean chambers

US Patent 11881385 · Granted Jan 23, 2024

Estimated economic value: $48,508,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Spray-coated electrostatic chuck design2025
Method for improving plant genetic transformation and gene editing efficiency2025
Liver cancer methylation markers and uses thereof2025
Lung cancer methylation markers and uses thereof2025
Colon cancer methylation markers and uses thereof2025
Image-based detection of ophthalmic and systemic diseases2025
Virtual object control method and apparatus, computer device, and storage medium2025
Adaptive straps for brassiere products and the method of making the same2025
Energy dissipating fiber/fabric and the method of making the same2025
On-board cleaning of tooling parts in hybrid bonding tool2025
Method and apparatus for displaying virtual environment picture, device, and sto2024
Method and apparatus for displaying virtual environment picture, device, and sto2024