Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881385 | Methods and apparatus for reducing defects in preclean chambers | Yueh Sheng Ow, Yuichi Wada, Junqi Wei, Kang Zhang, Ananthkrishna Jupudi +2 more | 2024-01-23 |
| 11557499 | Methods and apparatus for prevention of component cracking using stress relief layer | Yuichi Wada, Kok Wei Tan, Chul Nyoung Lee, Siew Kit Hoi, Xinxin Wang +2 more | 2023-01-17 |