Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D795209 | Heater for semiconductor thermal process | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2017-08-22 |
| D793975 | Heater for semiconductor thermal process | Hitoshi Murata, Takashi Yahata, Hidenari Yoshida, Shuhei Saido | 2017-08-08 |
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Hiroshi Ashihara, Hideto Tateno, Harunobu Sakuma | 2017-03-07 |
| 9365928 | Substrate processing apparatus, method for manufacturing semiconductor device and computer-readable recording medium | Shuhei Saido, Takafumi Sasaki | 2016-06-14 |
| 9190299 | Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium | Harunobu Sakuma, Hiroshi Ashihara, Hideto Tateno | 2015-11-17 |
| 7955948 | Manufacturing method of semiconductor device | Naofumi Ohashi, Nobuo Owada, Takeshi Taniguchi | 2011-06-07 |
| 7702539 | Picture order receiving apparatus and a picture processing system | — | 2010-04-20 |
| 7464966 | Through-panel fixing device for piping member | Atsuo Miyajima, Masayuki Sasagawa, Naomasa Kaneko, Toshikazu Ono | 2008-12-16 |
| 7101725 | Solution to thermal budget | Francisco Leon | 2006-09-05 |
| 7075165 | Embedded waveguide detectors | Francisco Leon, Lawrence C. West, Gregory L. Wojcik, Stephen Moffatt | 2006-07-11 |
| 7001788 | Maskless fabrication of waveguide mirrors | Francisco Leon, Lawrence C. West, Gregory L. Wojcik | 2006-02-21 |
| 6852626 | Film deposition method and apparatus | Hiroyuki Yarita, Hisashi Aida, Naomi Yoshida | 2005-02-08 |
| 6593252 | Film deposition method and apparatus | Hiroyuki Yarita, Hisashi Aida, Naomi Yoshida | 2003-07-15 |
| 6576567 | Film deposition method and apparatus for semiconductor devices | Hiroyuki Yarita, Hisashi Aida, Naomi Yoshida | 2003-06-10 |
| 6511538 | Film deposition method and apparatus for semiconductor devices | Hiroyuki Yarita, Hisashl Aida, Naomi Yoshida | 2003-01-28 |
| 6488984 | Film deposition method and apparatus | Hiroyuki Yarita, Hisashi Aida, Naomi Yoshida | 2002-12-03 |
| 6440282 | Sputtering reactor and method of using an unbalanced magnetron | Hisashi Aida, Kihwan Yoon | 2002-08-27 |
| 6210539 | Method and apparatus for producing a uniform density plasma above a substrate | Yoichiro Tanaka, Liubo Hong | 2001-04-03 |
| 6066558 | Multilevel interconnection forming method for forming a semiconductor device | Yumiko Kawano, Shigetoshi Hosaka, Hiroshi Kobayashi, Tetsuya Yano | 2000-05-23 |
| 5728276 | Treatment apparatus | Jiro Katsuki, Hiroshi Kobayashi | 1998-03-17 |
| 5624536 | Processing apparatus with collimator exchange device | Jiro Katsuki, Hiroshi Kobayashi | 1997-04-29 |
| 5584973 | Processing apparatus with an invertible collimator and a processing method therefor | Jiro Katsuki, Hiroshi Kobayashi | 1996-12-17 |
| 5267607 | Substrate processing apparatus | — | 1993-12-07 |
| 4786770 | Switchgear | Suenobu Hamano, Hiroyuki Sasao, Yutaka Murai, Hirosi Hasegawa, Tosimasa Maruyama | 1988-11-22 |
| 4733319 | High-speed current limiting circuit breaker | Shigehiro Yoshida, Kazuhiro Yokouchi, Masao Tomita, Kiyoshi Fukuda | 1988-03-22 |