Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11396700 | Substrate processing apparatus | Tomoshi Taniyama | 2022-07-26 |
| 8282737 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita +1 more | 2012-10-09 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita +1 more | 2011-10-25 |