Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10550468 | Substrate processing apparatus | Takayuki Nakada, Kenji Shirako | 2020-02-04 |
| 10508336 | Substrate processing apparatus | Takayuki Nakada, Takashi Nogami, Daigi KAMIMURA | 2019-12-17 |
| 10403528 | Substrate-processing apparatus and method of manufacturing semiconductor device | Yasuaki Komae, Takashi Nogami, Shigeru Odake | 2019-09-03 |
| 9966289 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Daigi KAMIMURA, Shigeru Odake, Takashi Nogami, Osamu Morita, Yasuaki Komae | 2018-05-08 |
| 9966286 | Substrate processing apparatus | Takashi Nogami, Kazuma Yoshioka | 2018-05-08 |
| D791090 | Reaction tube | Hidenari Yoshida | 2017-07-04 |
| D772824 | Reaction tube | Hidenari Yoshida | 2016-11-29 |
| D770993 | Reaction tube | Hidenari Yoshida | 2016-11-08 |
| D747279 | Boat for substrate processing apparatus | Hidenari Yoshida | 2016-01-12 |
| D738329 | Boat for substrate processing apparatus | Hidenari Yoshida | 2015-09-08 |
| D737785 | Boat for substrate processing apparatus | Hidenari Yoshida | 2015-09-01 |
| D734730 | Boat of substrate processing apparatus | Hidenari Yoshida | 2015-07-21 |
| 8791031 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Hidenari Yoshida | 2014-07-29 |
| 8282737 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2012-10-09 |
| 8172946 | Semiconductor device manufacturing apparatus and manufacturing method of semiconductor device | Yoshikazu Takashima, Mikio Ohno | 2012-05-08 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Hiroshi Unami, Kiyohiko Maeda, Shinya Morita, Yoshikazu Takashima +1 more | 2011-10-25 |
| 7731797 | Substrate treating apparatus and semiconductor device manufacturing method | Seiyo Nakashima, Kenichi Suzaki, Yoshikazu Takashima | 2010-06-08 |
| 6923867 | Substrate processing apparatus and method for manufacturing semiconductor device | Kouji Tometsuka, Shusaku Yanagawa | 2005-08-02 |
| 6495473 | Substrate processing apparatus and method of manufacturing semiconductor device | Kouji Tometsuka | 2002-12-17 |
| 5902103 | Vertical furnace of a semiconductor manufacturing apparatus and a boat cover thereof | Kiyohiko Maeda, Satoshi Kakizaki, Hidehiro Yanagawa, Ken Suzaki | 1999-05-11 |
| 5632820 | Thermal treatment furnace in a system for manufacturing semiconductors | Hideki Kaihotsu, Yoshikatsu Kanamori, Kazuhito Ikeda, Shuji Yonemitsu | 1997-05-27 |
| 5277215 | Method for supplying and discharging gas to and from semiconductor manufacturing equipment and system for executing the same | Hidehiro Yanagawa, Hiroyuki Nishiuchi, Masakazu Shimada, Mitsuhiro Hirano, Kazumi Nikaido +2 more | 1994-01-11 |