Issued Patents All Time
Showing 26–50 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11473196 | Substrate processing apparatus | Tetsuaki INADA | 2022-10-18 |
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Yasuhiro MIZUGUCHI, Shun MATSUI, Tadashi Takasaki | 2022-08-23 |
| 11380540 | Substrate processing apparatus | Takashi Nakagawa, Yoshiro Hirose, Tadashi Takasaki | 2022-07-05 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2022-05-24 |
| 11322370 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2022-05-03 |
| 11314234 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2022-04-26 |
| 11305986 | Method of manufacturing semiconductor device, substrate processing apparatus and program | Takashi Yahata, Tadashi Takasaki | 2022-04-19 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Shun MATSUI, Keita ICHIMURA | 2022-03-29 |
| 11145505 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Takashi Yahata, Ryuji Yamamoto | 2021-10-12 |
| 11104995 | Substrate processing apparatus | Takashi Yahata, Satoshi Takano, Kazuyuki Toyoda, Tadashi Takasaki | 2021-08-31 |
| 11043377 | Method of manufacturing semiconductor device | Yoshiro Hirose | 2021-06-22 |
| 11037823 | Method of manufacturing semiconductor device | Tsuyoshi Takeda, Toshiyuki Kikuchi | 2021-06-15 |
| 11027970 | Method of manufacturing semiconductor device | Yoshiro Hirose | 2021-06-08 |
| 10978361 | Substrate processing apparatus and recording medium | Takafumi Sasaki, Kazuhiro Morimitsu, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10978310 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature | Tsukasa Kamakura, Mitsuro Tanabe, Eisuke Nishitani, Tadashi Takasaki, Shun MATSUI | 2021-04-13 |
| 10964531 | Method of manufacturing semiconductor device by supplying gas | Takashi Nakagawa, Yoshiro Hirose, Tadashi Takasaki | 2021-03-30 |
| 10934622 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki, Shun MATSUI | 2021-03-02 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2021-02-23 |
| 10883172 | Method of manufacturing lithography template | — | 2021-01-05 |
| 10818476 | Substrate processing apparatus | Kazuyuki Toyoda | 2020-10-27 |
| 10685832 | Substrate processing apparatus | Tetsuaki INADA, Shun MATSUI | 2020-06-16 |
| 10651068 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Tadashi Takasaki, Shun MATSUI | 2020-05-12 |
| 10541170 | Substrate processing apparatus and method of manufacturing semiconductor device | Takashi Yahata, Shun MATSUI | 2020-01-21 |
| 10533250 | Method of manufacturing semiconductor device | Shun MATSUI | 2020-01-14 |