Issued Patents All Time
Showing 51–75 of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10503152 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2019-12-10 |
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10424520 | Method of manufacturing semiconductor device | Takafumi Sasaki, Kazuhiro Morimitsu, Tadashi Takasaki, Shun MATSUI | 2019-09-24 |
| 10340237 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2019-07-02 |
| 10224227 | Method of processing substrate | Satoshi Takano, Kazuyuki Toyoda, Shun MATSUI | 2019-03-05 |
| 10156798 | Substrate processing apparatus | — | 2018-12-18 |
| 10128128 | Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant | Tsuyoshi Takeda, Hiroshi Ashihara, Toshiyuki Kikuchi | 2018-11-13 |
| 10115583 | Method of manufacturing semiconductor device | Satoshi Shimamoto, Hiroshi Ashihara, Kazuyuki Toyoda | 2018-10-30 |
| 10014171 | Method of manufacturing semiconductor device | Yukinori Aburatani, Shin Hiyama, Tsuyoshi Takeda | 2018-07-03 |
| 9991179 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Satoshi Shimamoto, Toshiyuki Kikuchi | 2018-06-05 |
| 9966261 | Method of manufacturing semiconductor device | Katsuhiko Yamamoto | 2018-05-08 |
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsushi UEDA, Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Hideharu Itatani | 2017-10-10 |
| 9735068 | Method of manufacturing semiconductor device | Masanori NAKAYAMA, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2017-08-15 |
| 9728431 | Method of manufacturing semiconductor device | Toshiyuki Kikuchi, Shun MATSUI, Tadashi Takasaki | 2017-08-08 |
| 9698050 | Method of manufacturing semiconductor device | Hiroshi Ashihara, Tsuyoshi Takeda, Toshiyuki Kikuchi | 2017-07-04 |
| 9666477 | Method of manufacturing semiconductor device | Satoshi Takano | 2017-05-30 |
| 9484249 | Method of manufacturing semiconductor device | Satoshi Takano | 2016-11-01 |
| 9431220 | Substrate processing apparatus and substrate processing system | Masanori NAKAYAMA, Atsuhiko Suda, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
| 9396930 | Substrate processing apparatus | — | 2016-07-19 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Atsuhiko Suda, Satoshi Shimamoto | 2016-05-31 |
| 9018689 | Substrate processing apparatus and method of manufacturing semiconductor device | Yukitomo HIROCHI | 2015-04-28 |
| 8129275 | Process for manufacturing semiconductor integrated circuit device | Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada, Kenji Hinode +2 more | 2012-03-06 |
| 7955948 | Manufacturing method of semiconductor device | Yuichi Wada, Nobuo Owada, Takeshi Taniguchi | 2011-06-07 |
| 7659201 | Process for manufacturing semiconductor integrated circuit device | Junji Noguchi, Toshinori Imai, Hizuru Yamaguchi, Nobuo Owada, Kenji Hinode +2 more | 2010-02-09 |
| 7538038 | Method of removing resist, semiconductor device thereby and method of manufacturing a semiconductor device | Atsushi Matsushita, Isao Matsumoto, Kazuaki Inukai, Hong-Jae Shin, Shuji Sone +1 more | 2009-05-26 |