Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8227346 | Method of producing semiconductor device | Hironobu Miya, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2012-07-24 |
| 8193101 | Substrate processing apparatus and semiconductor device manufacturing method for forming film | Taketoshi Sato | 2012-06-05 |
| 8105957 | Method of producing semiconductor device | Hironobu Miya, Taketoshi Sato, Masayuki Asai, Norikazu Mizuno, Masanori Sakai +2 more | 2012-01-31 |
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-11-01 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 8028652 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-10-04 |
| 8020514 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-09-20 |
| 7958842 | Substrate processing apparatus | Shizue Ogawa, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-06-14 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Taketoshi Sato, Toru Kagaya, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-03-08 |
| 7861668 | Batch-type remote plasma processing apparatus | Yasuhiro Inokuchi, Motonari Takebayashi, Tadashi Kontani, Nobuo Ishimaru | 2011-01-04 |
| 7779785 | Production method for semiconductor device and substrate processing apparatus | Hironobu Miya, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2010-08-24 |
| 7033937 | Apparatus and method for use in manufacturing a semiconductor device | Osamu Kasahara, Tsutomu Tanaka, Mamoru Sueyoshi, Nobuhito Shima, Masanori Sakai | 2006-04-25 |
| 6576063 | Apparatus and method for use in manufacturing a semiconductor device | Osamu Kasahara, Tsutomu Tanaka, Mamoru Sueyoshi, Nobuhito Shima, Masanori Sakai | 2003-06-10 |
| 6053980 | Substrate processing apparatus | Atsuhiko Suda, Issei Makiguchi, Makoto Ozawa | 2000-04-25 |