Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8790463 | Substrate processing apparatus and semiconductor device producing method | Atsushi Moriya, Yasuhiro Inokuchi | 2014-07-29 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2012-09-11 |
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-11-01 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Toru Kagaya, Nobuhito Shima +5 more | 2011-03-08 |
| 7851379 | Substrate processing method and substrate processing apparatus | Atsushi Moriya, Yasuhiro Inokuchi | 2010-12-14 |
| 6949474 | Method of manufacturing a semiconductor device and a semiconductor manufacture system | Atsushi Moriya, Yasuhiro Inokuchi, Junichi Murota | 2005-09-27 |
| 6872636 | Method for fabricating a semiconductor device | Atsushi Moriya, Yasuhiro Inokuchi, Takaaki Noda | 2005-03-29 |
| 6503079 | Substrate processing apparatus and method for manufacturing semiconductor device | Minoru Kogano, Yasuhiro Inokuchi, Makoto Sambu, Atsushi Moriya | 2003-01-07 |
| 5188973 | Method of manufacturing SOI semiconductor element | Yasuhisa Omura, Katsutoshi Izumi | 1993-02-23 |