Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967512 | Substrate processing apparatus and method of manufacturing semiconductor device | Nobuaki Takehashi | 2024-04-23 |
| D965740 | Gas supply nozzle for substrate processing apparatus | Satoshi Fujii | 2022-10-04 |
| D944661 | Calibrator for wafer handling robots | Norihito Shitaka | 2022-03-01 |
| D940669 | Boat for substrate processing apparatus | Makoto Tsuri, Satoshi Fujii | 2022-01-11 |
| D920935 | Boat for substrate processing apparatus | Makoto Tsuri | 2021-06-01 |
| D918011 | Door latch for semiconductor manufacturing equipment | Satoshi Fujii | 2021-05-04 |
| 6503079 | Substrate processing apparatus and method for manufacturing semiconductor device | Minoru Kogano, Yasuhiro Inokuchi, Atsushi Moriya, Yasuo Kunii | 2003-01-07 |