Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D940669 | Boat for substrate processing apparatus | Makoto Sambu, Satoshi Fujii | 2022-01-11 |
| D924823 | Adiabatic plate for substrate processing apparatus | Koji Saiki | 2021-07-13 |
| D920935 | Boat for substrate processing apparatus | Makoto Sambu | 2021-06-01 |
| D890572 | Gas supply nozzle for substrate processing apparatus | Koji Saiki | 2020-07-21 |
| 8777553 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method | Makoto Hirano, Akinari Hayashi, Haruyuki Miyata | 2014-07-15 |