Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11336156 | Power control unit | Hiroshi Kunii, Yusuke Yamamura | 2022-05-17 |
| 11203488 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | — | 2021-12-21 |
| 10847397 | Substrate transfer unit, and substrate processing apparatus | — | 2020-11-24 |
| 10703565 | Substrate processing apparatus, substrate container transport system and operation mechanism | — | 2020-07-07 |
| 10519543 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2019-12-31 |
| 9695509 | Substrate processing apparatus, purging apparatus, method of manufacturing semiconductor device, and recording medium | Makoto Hirano | 2017-07-04 |
| 9564706 | Connection unit | Hiroyuki Ozawa, Takehiro Endo, Akihiko Takemura | 2017-02-07 |
| 8777553 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method | Makoto Hirano, Makoto Tsuri, Haruyuki Miyata | 2014-07-15 |
| 6582174 | Substrate processing apparatus and substrate processing method | — | 2003-06-24 |