Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6332927 | Substrate processing apparatus | Fumihide Ikeda | 2001-12-25 |
| 6270581 | Wet-oxidation apparatus and wet-oxidation method | Fumihide Ikeda | 2001-08-07 |
| 6217663 | Substrate processing apparatus and substrate processing method | Fumihide Ikeda, Michiko Nishiwaki, Masatoshi Takada, Mamoru Sueyoshi | 2001-04-17 |
| 6139641 | Substrate processing apparatus having a gas heating tube | Fumihide Ikeda | 2000-10-31 |
| 6132553 | Substrate processing apparatus | Fumihide Ikeda | 2000-10-17 |
| 5960159 | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety | Fumihide Ikeda, Junichi Machida, Masayuki Tomita, Kazuhiro Shimeno, Hisashi Nomura +1 more | 1999-09-28 |