Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7592256 | Method of forming tungsten film | Kazuya Okubo, Mitsuhiro Tachibana, Cheng Chia Fang, Kohichi Sato | 2009-09-22 |
| 7060614 | Method for forming film | Tsukasa Matsuda | 2006-06-13 |
| 6465347 | Tungsten film forming method | Mitsuhiro Tachibana | 2002-10-15 |
| 6331483 | Method of film-forming of tungsten | Mitsuhiro Tachibana | 2001-12-18 |