Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6399484 | Semiconductor device fabricating method and system for carrying out the same | Hideaki Yamasaki, Satoshi Yonezawa, Susumu Arima, Yumiko Kawano, Keizo Hosoda | 2002-06-04 |
| 6346425 | Vapor-phase processing method capable of eliminating particle formation | Natsuko Ito, Tsuyoshi Moriya, Fumihiko Uesugi, Shuji Moriya, Masaru Aomori +1 more | 2002-02-12 |
| 6331483 | Method of film-forming of tungsten | Hotaka Ishizuka | 2001-12-18 |
| 6036782 | Shower head | Sumi Tanaka, Sakae Nakatsuka | 2000-03-14 |
| 5997651 | Heat treatment apparatus | Kimihiro Matsuse, Tsuyoshi Hashimoto | 1999-12-07 |
| 5972114 | Film deposition apparatus with anti-adhesion film and chamber cooling means | Tomihiro Yonenaga, Sumi Tanaka | 1999-10-26 |
| 5578756 | Method and apparatus for evaluating soundness of block-like structures | Yutaka Nakamura, Muneyuki Tamogami, Shinji Sato | 1996-11-26 |
| 5303671 | System for continuously washing and film-forming a semiconductor wafer | Hiroshi Kondo | 1994-04-19 |