Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002781 | Semiconductor device and method for manufacturing same | — | 2024-06-04 |
| 11756891 | Semiconductor device and method for manufacturing same | — | 2023-09-12 |
| 11456028 | Semiconductor device and control method thereof | Koji Sakui | 2022-09-27 |
| 11437349 | Semiconductor device | Koji Sakui | 2022-09-06 |
| 11404396 | Semiconductor device comprising memory semiconductor chip in which memory cell is laminated on semiconductor substrate | Koji Sakui | 2022-08-02 |
| 11309290 | Semiconductor apparatus including penetration electrodes connecting laminated semiconductor chips | Koji Sakui | 2022-04-19 |
| 11302379 | Semiconductor apparatus | Koji Sakui | 2022-04-12 |
| 9748217 | Method of producing semiconductor device | — | 2017-08-29 |
| 8415202 | Method of manufacturing semiconductor device | — | 2013-04-09 |
| 7563729 | Method of forming a dielectric film | Shiqin Xiao | 2009-07-21 |
| 7279790 | Semiconductor device and a manufacturing method thereof | Hideki Kitada, Noriyoshi Shimizu, Nobuyuki Ohtsuka | 2007-10-09 |
| 7166516 | Method for fabricating a semiconductor device including the use of a compound containing silicon and nitrogen to form an insulation film of SiN or SiCN | Masayuki Furuhashi, Toshifumi Mori, Young Suk Kim, Ryou Nakamura | 2007-01-23 |
| 6998303 | Manufacture method for semiconductor device with patterned film of ZrO2 or the like | Yoshihiro Sugita, Yusuke Morisaki, Kiyoshi Irino, Shiqin Xiao | 2006-02-14 |
| 6805138 | Semiconductor device production method and semiconductor device production apparatus | Ade Asneil Akbar | 2004-10-19 |
| 6664179 | Semiconductor device production method and semiconductor device production apparatus | Ade Asneil Akbar | 2003-12-16 |
| 6355545 | Method and apparatus for wiring, wire, and integrated circuit | — | 2002-03-12 |
| RE36925 | Vacuum treatment apparatus and a method for manufacturing semiconductor device therein | Toshiya Suzuki, Seishi Murakami | 2000-10-31 |
| 5522412 | Vacuum treatment apparatus and a cleaning method therefor | Toshiya Suzuki, Seishi Murakami | 1996-06-04 |
| 5393565 | Method for deposition of a refractory metal nitride and method for formation of a conductive film containing a refractory metal nitride | Toshiya Suzuki, Shimpei Jinnouchi, Seishi Murakami | 1995-02-28 |
| 5264038 | Chemical vapor deposition system | Tatsushi Hara, Nobuhiro Misawa, Toshiya Suzuki, Fumitake Mieno, Akio Yamaguchi | 1993-11-23 |
| 5232872 | Method for manufacturing semiconductor device | — | 1993-08-03 |
| 5066612 | Method of forming wiring of a semiconductor device | Shinji Miyagaki, Tatsushi Hara, Kenji Morishita, Seiichi Suzuki, Seigen Ri | 1991-11-19 |
| 4902645 | Method of selectively forming a silicon-containing metal layer | — | 1990-02-20 |
| 4804560 | Method of selectively depositing tungsten upon a semiconductor substrate | Yoshimi Shioya, Yasushi Oyama, Norihisa Tsuzuki, Mamoru Maeda, Masaaki Ichikawa +6 more | 1989-02-14 |