Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5730804 | Process gas supply apparatus | Hisashi Gomi, Masahide Itoh, Towl Ikeda | 1998-03-24 |
| 5575854 | Semiconductor treatment apparatus | Hiroshi Kuno, Hiroshi Otsuki | 1996-11-19 |
| 5393565 | Method for deposition of a refractory metal nitride and method for formation of a conductive film containing a refractory metal nitride | Toshiya Suzuki, Takayuki Ohba, Seishi Murakami | 1995-02-28 |