Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7679737 | Method, system and apparatus of inspection | Naohiro Takahashi | 2010-03-16 |
| 7340352 | Inspecting method, inspecting apparatus, and method of manufacturing semiconductor device | Naohiro Takahashi | 2008-03-04 |
| 7005393 | Method of fabricating a semiconductor device containing nitrogen in an oxide film | — | 2006-02-28 |
| 6998303 | Manufacture method for semiconductor device with patterned film of ZrO2 or the like | Yoshihiro Sugita, Yusuke Morisaki, Shiqin Xiao, Takayuki Ohba | 2006-02-14 |
| 6984267 | Manufacture system for semiconductor device with thin gate insulating film | Ken-ichi Hikazutani, Tatsuya Kawamura, Taro Sugizaki, Satoshi Ohkubo, Toshiro Nakanishi +1 more | 2006-01-10 |
| 6979658 | Method of fabricating a semiconductor device containing nitrogen in a gate oxide film | — | 2005-12-27 |
| 6894369 | Semiconductor device having a high-dielectric gate insulation film and fabrication process thereof | Yusuke Morisaki, Yoshihiro Sugita, Yoshiaki Tanida, Yoshihisa Iba | 2005-05-17 |
| 6780699 | Semiconductor device and method for fabricating the same | Yasuyuki Tamura, Yusuke Morisaki, Yoshihiro Sugita, Takayuki Aoyama, Chikako Yoshida +3 more | 2004-08-24 |
| 6468926 | Manufacture method and system for semiconductor device with thin gate insulating film of oxynitride | Ken-ichi Hikazutani, Tatsuya Kawamura, Taro Sugizaki, Satoshi Ohkubo, Toshiro Nakanishi +1 more | 2002-10-22 |
| 5990517 | Semiconductor memory device containing nitrogen in a gate oxide film | — | 1999-11-23 |