Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7563729 | Method of forming a dielectric film | Takayuki Ohba | 2009-07-21 |
| 6998303 | Manufacture method for semiconductor device with patterned film of ZrO2 or the like | Yoshihiro Sugita, Yusuke Morisaki, Kiyoshi Irino, Takayuki Ohba | 2006-02-14 |
| 6562219 | Method for the formation of copper wiring films | Akiko Kobayashi, Atsushi Sekiguchi, Tomoaki Koide, Minjuan Zhang, Hideki Sunayama +1 more | 2003-05-13 |