SY

Shunji YAMAKAWA

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Jinshanmian, TW: #374 of 466 inventorsTop 85%
Overall (All Time): #2,594,685 of 4,157,543Top 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11702734 Method for forming ruthenium film and apparatus for forming ruthenium film Tadahiro Ishizaka, Kohichi Satoh, Masato Araki 2023-07-18