Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8465719 | Silicon carbide substrate, semiconductor device, wiring substrate, and silicon carbide manufacturing method | Tadahiro Ohmi, Akinobu Teramoto, Sumio Sano | 2013-06-18 |
| 7087980 | Film thickness measuring monitor wafer | Makoto Ebata, Makoto Saito | 2006-08-08 |