Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725284 | Substrate processing apparatus and substrate processing method | Chiaki Takeuchi | 2023-08-15 |
| 11567485 | Substrate processing system and method for monitoring process data | Nobutoshi TERASAWA, Noriaki Koyama, Tomonori Yamashita, Takazumi Tanaka, Takehiro KINOSHITA +1 more | 2023-01-31 |
| 10968515 | Vertical heat treatment apparatus | Hiromi Shima, Kyungseok Ko, Shingo Hishiya, Keisuke Suzuki, Tosihiko Jo +2 more | 2021-04-06 |
| 10964530 | Method of forming blocking silicon oxide film, and storage medium | Kyungseok Ko, Hiromi Shima, Keisuke Suzuki, Shingo Hishiya | 2021-03-30 |
| 10781515 | Film-forming method and film-forming apparatus | Kyungseok Ko, Hiromi Shima, Keisuke Suzuki | 2020-09-22 |
| 10553686 | Method and apparatus for forming silicon oxide film, and storage medium | Kyungseok Ko, Hiromi Shima, Shingo Hishiya | 2020-02-04 |
| 8338312 | Film formation method, film formation apparatus, and method for using film formation apparatus | Jun Sato, Masataka Toiya, Tetsuya Shibata | 2012-12-25 |