Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8338312 | Film formation method, film formation apparatus, and method for using film formation apparatus | Jun Sato, Eiji Kikama, Tetsuya Shibata | 2012-12-25 |
| 8153534 | Direct oxidation method for semiconductor process | Hisashi Inoue, Yoshikatsu Mizuno | 2012-04-10 |
| D594488 | Process tube for manufacturing semiconductor wafers | Yoshikatsu Mizuno, Hisashi Inoue | 2009-06-16 |