Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428242 | Information processing apparatus, transfer position correction method, and substrate processing apparatus | Tadashi Enomoto, Nao Akashi, Youngtai KANG | 2025-09-30 |
| 9857124 | Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus | Mitsuru Obara, Hisashi Inoue, Masahiro Kobayashi, Norio Baba, Hiroshi Kikuchi | 2018-01-02 |
| 8216378 | Reaction tube and heat processing apparatus for a semiconductor process | Hirofumi Kaneko, Hisashi Inoue, Shingo Hishiya, Atsushi Endoh | 2012-07-10 |