Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428242 | Information processing apparatus, transfer position correction method, and substrate processing apparatus | Tadashi Enomoto, Nao Akashi, Keishi Shionaga | 2025-09-30 |
| 12165892 | Control device, system and control method | Yuichi Takenaga, Takahito Kasai | 2024-12-10 |
| 11804395 | Substrate processing apparatus, information processing apparatus, and substrate processing method | Yuichi Takenaga | 2023-10-31 |
| 11574828 | Substrate processing apparatus, information processing apparatus, and information processing method | — | 2023-02-07 |
| 11568027 | License authentication device and license authentication method | Takahito Kasai | 2023-01-31 |
| 11302555 | Substrate processing apparatus, information processing apparatus, and substrate processing method | Yuichi Takenaga | 2022-04-12 |