Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165892 | Control device, system and control method | Yuichi Takenaga, Youngtai KANG | 2024-12-10 |
| 11568027 | License authentication device and license authentication method | Youngtai KANG | 2023-01-31 |
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga, Yozo Nagata | 2020-06-23 |
| 10607869 | Substrate processing system and control device | Yuichi Takenaga | 2020-03-31 |
| 10504803 | Substrate processing system, control device, and film deposition method and program | Yuichi Takenaga | 2019-12-10 |
| 10395934 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga | 2019-08-27 |
| 9207665 | Heat treatment apparatus and method of controlling the same | Goro Takahashi, Takanori Saito, Wenling Wang, Koji Yoshii, Tatsuya Yamaguchi | 2015-12-08 |