Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692782 | Control device, substrate processing system, substrate processing method, and program | Yuichi Takenaga, Takahito Kasai | 2020-06-23 |
| 6313432 | Laser cutting method and laser cutter | Masayuki Nagahori | 2001-11-06 |