Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5651670 | Heat treatment method and apparatus thereof | Yasushi Yagi, Satoshi Kawachi | 1997-07-29 |
| 5592581 | Heat treatment apparatus | — | 1997-01-07 |
| 5571010 | Heat treatment method and apparatus | — | 1996-11-05 |
| 5554226 | Heat treatment processing apparatus and cleaning method thereof | Masaaki Hasei | 1996-09-10 |
| 5429498 | Heat treatment method and apparatus thereof | Yasushi Yagi, Satoshi Kawachi | 1995-07-04 |
| 5427625 | Method for cleaning heat treatment processing apparatus | Masaaki Hasei | 1995-06-27 |
| 5359148 | Heat-treating apparatus | Takashi Tanahashi, Takenobu Matsuo | 1994-10-25 |
| 5329095 | Thermal treatment apparatus utilizing heated lid | — | 1994-07-12 |
| 5279670 | Vertical type diffusion apparatus | Singo Watanabe | 1994-01-18 |