Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5826130 | Apparatus and method for developing resist coated on substrate | Hideya Tanaka, Kosuke Yoshihara | 1998-10-20 |
| 5689749 | Apparatus for developing a resist-coated substrate | Hideya Tanaka, Kosuke Yoshihara | 1997-11-18 |
| 5416047 | Method for applying process solution to substrates | Nobuo Konishi, Hideyuki Takamori, Masami Akimoto, Kiyohisa Tateyama, Masaaki Murakami +1 more | 1995-05-16 |