Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379469 | Apparatus and method for washing substrate | Kenichi Miyamoto, Minoru Kubota, Walter Swanson | 2002-04-30 |
| 6158075 | Apparatus and method for washing substrate | Kenichi Miyamoto, Minoru Kubota, Walter Swanson | 2000-12-12 |
| 6059891 | Apparatus and method for washing substrate | Minoru Kubota, Kenichi Miyamoto, Ryoji Higuchi | 2000-05-09 |
| 5826130 | Apparatus and method for developing resist coated on substrate | Norimitsu Morioka, Kosuke Yoshihara | 1998-10-20 |
| 5689749 | Apparatus for developing a resist-coated substrate | Norimitsu Morioka, Kosuke Yoshihara | 1997-11-18 |
| 5679226 | Oxygen sensor | Keizo Furusaki, Tatsuya Okumura, Yasuhiro Yamada | 1997-10-21 |
| 4272352 | Electrode compartment | Tanzo Jizaimaru, Yasuo Sajima | 1981-06-09 |