Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379469 | Apparatus and method for washing substrate | Hideya Tanaka, Kenichi Miyamoto, Minoru Kubota | 2002-04-30 |
| 6158075 | Apparatus and method for washing substrate | Hideya Tanaka, Kenichi Miyamoto, Minoru Kubota | 2000-12-12 |
| 5806319 | Method and apparatus for cryogenically cooling a deposition chamber | John Wary, Roger A. Olson, William F. Beach | 1998-09-15 |
| D293487 | Bar of soap | — | 1987-12-29 |