Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051276 | Internally heated pyrolysis zone | John Wary, Roger A. Olson | 2000-04-18 |
| 5879808 | Parylene polymer layers | John Wary, Roger A. Olson | 1999-03-09 |
| 5806319 | Method and apparatus for cryogenically cooling a deposition chamber | John Wary, Roger A. Olson, Walter Swanson | 1998-09-15 |
| 5709753 | Parylene deposition apparatus including a heated and cooled dimer crucible | Roger A. Olson, John Wary | 1998-01-20 |
| 5556473 | Parylene deposition apparatus including dry vacuum pump system and downstream cold trap | Roger A. Olson, John Wary | 1996-09-17 |
| 5538758 | Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers | Roger A. Olson, John Wary | 1996-07-23 |
| 5536319 | Parylene deposition apparatus including an atmospheric shroud and inert gas source | John Wary, Roger A. Olson | 1996-07-16 |
| 5536317 | Parylene deposition apparatus including a quartz crystal thickness/rate controller | Kermit Crain, John Wary, Roger A. Olson | 1996-07-16 |
| 5536321 | Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter | Roger A. Olsen, John Wary | 1996-07-16 |
| 5536322 | Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device | John Wary, Roger A. Olson | 1996-07-16 |
| 5534068 | Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement | John Wary, Roger A. Olson | 1996-07-09 |
| 5139813 | Method for inducing fluorescence in parylene films by an active plasma | Joseph H. Yira | 1992-08-18 |
| 4291244 | Electrets | Dennis Michael Mahoney | 1981-09-22 |