| 6051276 |
Internally heated pyrolysis zone |
William F. Beach, Roger A. Olson |
2000-04-18 |
| 5879808 |
Parylene polymer layers |
William F. Beach, Roger A. Olson |
1999-03-09 |
| 5806319 |
Method and apparatus for cryogenically cooling a deposition chamber |
Roger A. Olson, William F. Beach, Walter Swanson |
1998-09-15 |
| 5709753 |
Parylene deposition apparatus including a heated and cooled dimer crucible |
Roger A. Olson, William F. Beach |
1998-01-20 |
| 5556473 |
Parylene deposition apparatus including dry vacuum pump system and downstream cold trap |
Roger A. Olson, William F. Beach |
1996-09-17 |
| 5538758 |
Method and apparatus for the deposition of parylene AF4 onto semiconductor wafers |
William F. Beach, Roger A. Olson |
1996-07-23 |
| 5536319 |
Parylene deposition apparatus including an atmospheric shroud and inert gas source |
Roger A. Olson, William F. Beach |
1996-07-16 |
| 5536317 |
Parylene deposition apparatus including a quartz crystal thickness/rate controller |
Kermit Crain, Roger A. Olson, William F. Beach |
1996-07-16 |
| 5536321 |
Parylene deposition apparatus including a post-pyrolysis filtering chamber and a deposition chamber inlet filter |
Roger A. Olsen, William F. Beach |
1996-07-16 |
| 5536322 |
Parylene deposition apparatus including a heated and cooled support platen and an electrostatic clamping device |
Roger A. Olson, William F. Beach |
1996-07-16 |
| 5534068 |
Parylene deposition apparatus including a tapered deposition chamber and dual vacuum outlet pumping arrangement |
William F. Beach, Roger A. Olson |
1996-07-09 |
| 4513023 |
Method of constructing thin electroluminescent lamp assemblies |
— |
1985-04-23 |