Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6110282 | Coating apparatus for semiconductor process | Tetsu Kawasaki | 2000-08-29 |
| 6104002 | Heat treating apparatus | Osamu Hirose | 2000-08-15 |
| 6090205 | Apparatus for processing substrate | Mitsuhiro Sakai | 2000-07-18 |
| 6062288 | Processing apparatus | — | 2000-05-16 |
| 6062241 | Substrate conveying device and substrate conveying method | Tatsuya Iwasaki | 2000-05-16 |
| 6058544 | Scrubbing apparatus and scrubbing method | Kimio Motoda, Yoshiharu Ota, Norio Uchihira | 2000-05-09 |
| 6056828 | Substrate conveying device and substrate conveying method | — | 2000-05-02 |
| 6013317 | Coating apparatus and method therefor | Kimio Motoda | 2000-01-11 |
| 6008978 | Discharging method and processing apparatus having discharging function | — | 1999-12-28 |
| 5993518 | Deaerating apparatus, deaerating method, and treatment apparatus | — | 1999-11-30 |
| 5993552 | Processing apparatus | Takeshi Tsukamoto, Kazuhiko Murata | 1999-11-30 |
| 5970717 | Cooling method, cooling apparatus and treatment apparatus | — | 1999-10-26 |
| 5967159 | Substrate conveying device and substrate conveying method | — | 1999-10-19 |
| 5965200 | Processing apparatus and processing method | Masafumi Nomura, Takayuki Tomoeda | 1999-10-12 |
| 5943880 | Cooling apparatus, cooling method, and processing apparatus | — | 1999-08-31 |
| 5945161 | Apparatus and method for supplying process solution to surface of substrate to be processed | Hiroshi Hashimoto, Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Norio Uchihira, Mitsuhiro Sakai +1 more | 1999-08-31 |
| 5941083 | Cooling device and cooling method | Tetsuya Sada, Osamu Hirose | 1999-08-24 |
| 5919520 | Coating method and apparatus for semiconductor process | Kimio Motoda, Noriyuki Anai | 1999-07-06 |
| 5912054 | Coating method and apparatus | — | 1999-06-15 |
| 5871584 | Processing apparatus and processing method | Masafumi Nomura, Takayuki Tomoeda | 1999-02-16 |
| 5853961 | Method of processing substrate and apparatus for processing substrate | Mitsuhiro Sakai | 1998-12-29 |
| 5853803 | Resist processing method and apparatus | Kimio Motoda, Tatsuya Iwasaki, Takenobu Matsuo, Kazuki Denpoh, Eiji Yamaguchi | 1998-12-29 |
| 5834737 | Heat treating apparatus | Osamu Hirose | 1998-11-10 |
| 5817156 | Substrate heat treatment table apparatus | Osamu Hirose | 1998-10-06 |
| 5813819 | Substrate transfer apparatus, and method of transferring substrates | Tetu Ohsawa | 1998-09-29 |