Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5813819 | Substrate transfer apparatus, and method of transferring substrates | Kiyohisa Tateyama | 1998-09-29 |
| 5645391 | Substrate transfer apparatus, and method of transferring substrates | Kiyohisa Tateyama | 1997-07-08 |
| D366868 | Wafer boat or rack | — | 1996-02-06 |
| 5296412 | Method of heat treating semiconductor wafers by varying the pressure and temperature | — | 1994-03-22 |