Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5803970 | Method of forming a coating film and coating apparatus | Kimio Motoda, Kenji Sekiguchi, Tsutae Omori | 1998-09-08 |
| 5762708 | Coating apparatus therefor | Kimio Motoda | 1998-06-09 |
| 5718763 | Resist processing apparatus for a rectangular substrate | Kimio Motoda, Tatsuya Iwasaki, Takenobu Matsuo, Kazuki Denpoh, Eiji Yamaguchi | 1998-02-17 |
| 5695817 | Method of forming a coating film | Kimio Motoda, Kenji Sekiguchi, Tsutae Omori | 1997-12-09 |
| 5688322 | Apparatus for coating resist on substrate | Kimio Motoda, Noriyuki Anai | 1997-11-18 |
| 5685039 | Cleaning apparatus | Tomoko Hamada, Mitiaki Matsushita, Akira Yonemizu | 1997-11-11 |
| 5645391 | Substrate transfer apparatus, and method of transferring substrates | Tetu Ohsawa | 1997-07-08 |
| 5626675 | Resist processing apparatus, substrate processing apparatus and method of transferring a processed article | Yasuhiro Sakamoto, Masami Akimoto, Shinzi Kitamura | 1997-05-06 |
| 5442416 | Resist processing method | Masami Akimoto, Mitsuru Ushijima | 1995-08-15 |
| 5421056 | Spin chuck and treatment apparatus using same | Michiaki Matsushita | 1995-06-06 |
| 5416047 | Method for applying process solution to substrates | Nobuo Konishi, Hideyuki Takamori, Masami Akimoto, Masaaki Murakami, Norimitsu Morioka +1 more | 1995-05-16 |
| 5375291 | Device having brush for scrubbing substrate | Michiaki Matsushita | 1994-12-27 |
| 5374312 | Liquid coating system | Keizo Hasebe, Yuji Yoshimoto, Yuji Matsuyama, Tetsuro Nakahara, Yoshio Kimura | 1994-12-20 |
| 5339128 | Resist processing method | Masami Akimoto, Mitsuru Ushijima | 1994-08-16 |
| 5252137 | System and method for applying a liquid | Keizo Hasebe | 1993-10-12 |
| 5250114 | Coating apparatus with nozzle moving means | Nobuo Konishi, Hideyuki Takamori, Masami Akimoto | 1993-10-05 |
| 5239182 | Wafer conveyor apparatus and method for detecting inclination of wafer inside cassette | Yasuhiro Sakamoto | 1993-08-24 |
| 5202716 | Resist process system | Masami Akimoto, Mitsuru Ushijima | 1993-04-13 |