Issued Patents All Time
Showing 26–50 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9351389 | Plasma processing apparatus | — | 2016-05-24 |
| 9313872 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2016-04-12 |
| 9293299 | Plasma processing apparatus | — | 2016-03-22 |
| 9275837 | Plasma processing apparatus | Naoki Matsumoto, Masahide Iwasaki, Naohiko Okunishi | 2016-03-01 |
| 9253867 | Plasma processing apparatus and plasma processing method | Masashi Saito, Kazuki Denpoh, Chishio Koshimizu, Jun Yamawaku | 2016-02-02 |
| 9218943 | Plasma processing apparatus and plasma processing method | — | 2015-12-22 |
| 9167680 | Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method | Takafumi Kimura, Chishio Koshimizu | 2015-10-20 |
| 9119282 | Plasma processing apparatus and plasma processing method | — | 2015-08-25 |
| 8964350 | Substrate removing method and storage medium | Jun Yamawaku | 2015-02-24 |
| 8894806 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu | 2014-11-25 |
| 8790490 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +6 more | 2014-07-29 |
| 8741097 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2014-06-03 |
| 8689733 | Plasma processor | Chishio Koshimizu | 2014-04-08 |
| 8647442 | Cleaning substrate and cleaning method | Hiroshi Nagaike, Masashi Saito, Masanobu Honda | 2014-02-11 |
| 8608903 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku, Hachishiro Iizuka | 2013-12-17 |
| 8603293 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2013-12-10 |
| 8593780 | Substrate removing method and storage medium | Jun Yamawaku | 2013-11-26 |
| 8529730 | Plasma processing apparatus | — | 2013-09-10 |
| 8431035 | Plasma processing apparatus and method | Manabu Iwata, Chishio Koshimizu | 2013-04-30 |
| 8415885 | Plasma processing apparatus and plasma processing method | — | 2013-04-09 |
| 8398815 | Plasma processing apparatus | Naohiko Okunishi | 2013-03-19 |
| 8261691 | Plasma processing apparatus | — | 2012-09-11 |
| 8251011 | Plasma processing apparatus | Manabu Iwata, Chishio Koshimizu, Fumihiko Higuchi, Akitaka Shimizu, Asao Yamashita +5 more | 2012-08-28 |
| 8157953 | Plasma processing apparatus | — | 2012-04-17 |