Issued Patents All Time
Showing 76–100 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8404595 | Plasma processing method | Manabu Sato, Yoshiki Igarashi | 2013-03-26 |
| 8303834 | Plasma processing apparatus and plasma etching method | Kenji Masuzawa, Hiroyuki Nakayama, Manabu Iwata, Manabu Sato, Kazuki Narishige | 2012-11-06 |
| 8293655 | Dry etching method | Shoichiro Matsuyama | 2012-10-23 |
| 8263499 | Plasma processing method and computer readable storage medium | Michiko Nakaya | 2012-09-11 |
| 8241514 | Plasma etching method and computer readable storage medium | Hiroyuki Nakayama, Manabu Sato | 2012-08-14 |
| 8199427 | Disk drive including a shroud configured to overlap an actuator for removing debris from a head-slider | Kazuhisa Murakami, Teruyoshi Higashiya, Mitsuhiko Oguchi | 2012-06-12 |
| 8178444 | Substrate processing method and substrate processing apparatus | Chishio Koshimizu, Taichi Hirano, Shinji Himori | 2012-05-15 |
| 8173036 | Plasma processing method and apparatus | Tetsuji Sato, Shin Matsuura, Yutaka Matsui | 2012-05-08 |
| 8157952 | Plasma processing chamber, potential controlling apparatus, potential controlling method, program for implementing the method, and storage medium storing the program | Toshihiro Hayami | 2012-04-17 |
| 8141514 | Plasma processing apparatus, plasma processing method, and storage medium | Naoki Matsumoto, Satoshi Tanaka, Yutaka Matsui | 2012-03-27 |
| 8128831 | Plasma etching method and computer-readable storage medium | Manabu Sato, Yoshiki Igarashi, Yoshimitsu Kon | 2012-03-06 |
| 8104428 | Plasma processing apparatus | Noriaki Kodama | 2012-01-31 |
| 8105949 | Substrate processing method | Hironobu Ichikawa | 2012-01-31 |
| 8057603 | Method of cleaning substrate processing chamber, storage medium, and substrate processing chamber | Yutaka Matsui | 2011-11-15 |
| 7895970 | Structure for plasma processing chamber, plasma processing chamber, plasma processing apparatus, and plasma processing chamber component | Toshihiro Hayami, Yutaka Matsui | 2011-03-01 |
| 7883632 | Plasma processing method | Yutaka Matsui, Manabu Sato | 2011-02-08 |
| 7883631 | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium | Akinori Kitamura, Nozomi Hirai | 2011-02-08 |
| 7794616 | Etching gas, etching method and etching gas evaluation method | Akinori Kitamura, Kazuya Nagaseki | 2010-09-14 |
| 7749914 | Plasma etching method | Kazuya Nagaseki, Hisataka Hayashi | 2010-07-06 |
| 7655572 | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium | Akinori Kitamura, Nozomi Hirai, Masahiro Nakamura, Tatsuya Sugimoto | 2010-02-02 |
| 7625494 | Plasma etching method and plasma etching unit | Kazuya Nagaseki, Koichiro Inazawa, Shoichiro Matsuyama, Hisataka Hayashi | 2009-12-01 |
| 7501350 | Plasma processing method | — | 2009-03-10 |
| 7473377 | Plasma processing method | Tomoyo Yamaguchi, Takashi Fuse, Kiwamu Fujimoto, Kazuya Nagaseki, Akiteru Koh +3 more | 2009-01-06 |
| 7419613 | Method and device for plasma-etching organic material film | Shoichiro Matsuyama, Kazuya Nagaseki, Hisataka Hayashi | 2008-09-02 |
| 7338576 | Plasma processing device | Hiroo Ono, Koichi Tateshita, Kazuya Nagaseki, Daisuke Hayashi | 2008-03-04 |