Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950415 | Plasma processing apparatus and plasma processing method | — | 2021-03-16 |
| 10950418 | Plasma processing apparatus and plasma processing method | — | 2021-03-16 |
| 8419337 | Gate valve and substrate processing system using same | Tetsuya Mochizuki | 2013-04-16 |
| 7338576 | Plasma processing device | Hiroo Ono, Masanobu Honda, Kazuya Nagaseki, Daisuke Hayashi | 2008-03-04 |