Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881806 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Masanobu Honda, Kazuhiro Kubota | 2018-01-30 |
| 9793134 | Etching method | Yusuke Saitoh | 2017-10-17 |
| 9613824 | Etching method | Yusuke Saitoh, Isao Tafusa | 2017-04-04 |
| 9318340 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Masanobu Honda, Kazuhiro Kubota | 2016-04-19 |
| 9147580 | Plasma etching method and plasma processing apparatus | Takayuki Katsunuma, Masanobu Honda, Jin Kudo | 2015-09-29 |
| 9087676 | Plasma processing method and plasma processing apparatus | Takayuki Katsunuma, Masanobu Honda | 2015-07-21 |
| 8557706 | Substrate processing method | Masanobu Honda | 2013-10-15 |
| 8105949 | Substrate processing method | Masanobu Honda | 2012-01-31 |
| 7682544 | Method of fabricating photovoltaic panel | Koichi Asai, Kazutoshi Sakai, Mitsuo Morishita, Shunji Yoshikane | 2010-03-23 |