Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631590 | Substrate processing method, substrate processing apparatus and cleaning apparatus | Taku Gohira, Takahiro Murakami | 2023-04-18 |
| 10867777 | Plasma processing method and plasma processing apparatus | Wataru TAKAYAMA, Rei Ibuka, Dai Igarashi, Takayuki Suzuki, Takahiro Murakami | 2020-12-15 |
| 10784088 | Plasma processing method | Dai Igarashi, Rei Ibuka, Takahiro Murakami | 2020-09-22 |