Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266514 | Substrate processing apparatus and substrate temperature correction method | Dai Igarashi, Yuki Kato | 2025-04-01 |
| 10867777 | Plasma processing method and plasma processing apparatus | Wataru TAKAYAMA, Muneyuki Omi, Dai Igarashi, Takayuki Suzuki, Takahiro Murakami | 2020-12-15 |
| 10784088 | Plasma processing method | Dai Igarashi, Muneyuki Omi, Takahiro Murakami | 2020-09-22 |