Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515183 | Substrate processing system | Suguru Motegi, Takashi Kumagai | 2022-11-29 |
| 11495480 | Substrate processing system | Suguru Motegi, Takashi Kumagai, Keisuke YOSHIMURA | 2022-11-08 |
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Shigeki Tozawa, Kazuhiro Kubota, Yuki Chiba | 2011-04-12 |
| 7883579 | Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus | Shinichi Miyano, Takehiro Kato | 2011-02-08 |