Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821644 | Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium | Akinori Kitamura, Tsutomu Hiroki, Takehiro Shindo | 2014-09-02 |
| 8187981 | Substrate processing method, substrate processing system, and computer-readable storage medium | Kazuhiro Tomioka, Nobuyoshi Kobayashi, Kazuhiro Kubota | 2012-05-29 |
| 8021564 | Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium | Kazuhiro Kubota | 2011-09-20 |