Issued Patents All Time
Showing 51–75 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8243265 | Method and apparatus for detecting foreign materials and storage medium | Hiroshi Nagaike, Hideaki Yakushiji | 2012-08-14 |
| 8236109 | Component cleaning method and storage medium | Akitaka Shimizu | 2012-08-07 |
| 8231800 | Plasma processing apparatus and method | Hiroyuki Nakayama | 2012-07-31 |
| 8218145 | Particle monitor system and substrate processing apparatus | Takashi Enomoto | 2012-07-10 |
| 8210742 | Method and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium | Eiichi Nishimura | 2012-07-03 |
| 8208802 | Focusing position determining apparatus, imaging apparatus and focusing position determining method | Yuki Endo, Toshiyuki Tanaka, Toshihiro Hamamura, Naoki Takafuji | 2012-06-26 |
| 8206513 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Hiroshi Nagaike, Hiroyuki Nakayama | 2012-06-26 |
| 8202394 | Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus | Natsuko Ito, Fumihiko Uesugi | 2012-06-19 |
| 8172949 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Kazunori Kazama, Hiroyuki Nakayama +1 more | 2012-05-08 |
| 8152907 | Gas purification apparatus and method | — | 2012-04-10 |
| 8137473 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Hiroshi Nagaike, Hiroyuki Nakayama | 2012-03-20 |
| 8132580 | Substrate processing system and substrate cleaning apparatus including a jetting apparatus | Tadashi Onishi, Ryo Nonaka, Eiichi Nishimura | 2012-03-13 |
| 8113757 | Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber | Hiroyuki Nakayama, Keisuke Kondoh, Hiroki Oka | 2012-02-14 |
| 8082124 | Method and system for diagnosing abnormal plasma discharge | Takaya Miyano, Toshiyuki Matsumoto, Naoki Ikeuchi | 2011-12-20 |
| 8062432 | Cleaning method for turbo molecular pump | Eiichi Sugawara | 2011-11-22 |
| 8058186 | Components for substrate processing apparatus and manufacturing method thereof | Kouji Mitsuhashi, Akira Uedono | 2011-11-15 |
| 8052376 | Turbo-molecular pump, substrate processing apparatus, and method for suppressing attachment of depositions to turbo-molecular pump | Jun Yamawaku | 2011-11-08 |
| 8052798 | Particle removal apparatus and method and plasma processing apparatus | Hiroshi Nagaike | 2011-11-08 |
| 8048235 | Gate valve cleaning method and substrate processing system | Hiroyuki Nakayama, Keisuke Kondoh, Hiroki Oka | 2011-11-01 |
| 8043971 | Plasma processing apparatus, ring member and plasma processing method | Yasuharu Sasaki, Hiroshi Nagaike | 2011-10-25 |
| 8012303 | Container cleanliness measurement apparatus and method, and substrate processing system | Toshiya Matsuda | 2011-09-06 |
| 7976637 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Hiroshi Nagaike | 2011-07-12 |
| 7969572 | Particle monitor system and substrate processing apparatus | Takashi Enomoto | 2011-06-28 |
| 7942975 | Ceramic sprayed member-cleaning method | Kouji Mitsuhashi | 2011-05-17 |
| 7937178 | Charging method for semiconductor device manufacturing apparatus, storage medium storing program for implementing the charging method, and semiconductor device manufacturing apparatus implementing the charging method | — | 2011-05-03 |