Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082124 | Method and system for diagnosing abnormal plasma discharge | Toshiyuki Matsumoto, Naoki Ikeuchi, Tsuyoshi Moriya | 2011-12-20 |
| 6373264 | Impedance detection apparatus and method of physical variable | Toshiyuki Matsumoto, Yoshihiro Hirota, Muneo Harada | 2002-04-16 |
| 6327540 | Method of detecting end point of process, end point detector, computer memory product and chemical mechanical polishing apparatus | Kiyoshi Miura, Kazuto Hasegawa, Yasuo Shirai | 2001-12-04 |
| 6326795 | Capacitance detection system and method | Toshiyuki Matsumoto, Yoshihiro Hirota, Muneo Harada | 2001-12-04 |
| 6227054 | Vibration wave detecting method and vibration wave detector | Shigeru Ando, Toshiyuki Matsumoto, Muneo Harada | 2001-05-08 |
| 6012334 | Vibration wave detecting method and vibration wave detector | Shigeru Ando, Toshiyuki Matsumoto, Muneo Harada | 2000-01-11 |
| 5091338 | Process for forming heat resistant ohmic electrode | Junichi Tsuchimoto, Tooru Yamada | 1992-02-25 |
| 4989065 | Heat-resistant ohmic electrode | Junichi Tsuchimoto, Tooru Yamada | 1991-01-29 |